Chapter 16
Scanning Electron Microscope Training
The scanning electron microscope (SEM) is a microscope that uses electrons instead of light to form an image. The learning objective of this chapter is for readers to gain a comprehensive understanding of performing high-quality SEM imaging. The purpose of this chapter is for readers to understand how to operate a scanning electron microscope and then how to use electron imaging in a variety of security and trust related applications. In addition, we demonstrate how to detect malicious modifications by an untrusted foundry inside an IC using SEM images. After successfully completing this experiment, readers will understand hardware Trojans and detecting them using various SEM imaging methods and comprehend the sample preparation process.